At the moment, you have four separate instances of the subflow. That is not the same thing as having one instance of the subflow handling multiple messages.
It sounds like you want to have a flow that is called from multiple places.
One option would be to use Link nodes to pass messages from your different flows to the flow you want to handle the messages - and not to use Subflows which aren't designed for this scenario.
When you have multiple instances of a subflow then each delay node is a separate node, so each one limits the rate of output of messages passing through it, but as each one node sees only one message then the delay nodes have no effect.
What are you actually trying to achieve with multiple instances of the same subflow being given the same messages?
It works for me realy perfeŃt! Thanks one more time!
Now i got other but much smaller problem. As i understood Links do not works with Subflows, when i set Link unside Subflow it do not link. Is there a way to solve it?
You can use links within a subflow. You can't link into a subflow of course, because node-red wouldn't know which instance of the subflow you wanted to link into, and if you want to link out of a subflow then you can use an additional output instead.